Low Temperature Plasma Processes: From Silicon Thin Films to Epitaxial Growth and Nanostructure for Photovoltaics


Silicon thin film technology has been driven by hydrogenated amorphous and microcrystalline silicon thin films which are routinely produced using silane plasmas. While SiH3 is often considered as the main radical for the... [ view full abstract ]


  1. Pere Roca i Cabarrocas (Ecole Polytechnique)

Topic Area

Photovoltaic and solar energy systems


PL2c » Plenary Speeches (13:30 - Thursday, 26th April, Auditorium)

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