Two-axis MEMS scanner in a resonance operation for diagnosis of middle ear diseases
Abstract
A two-axis electrostatic MEMS scanner was fabricated to realize an OCT probe for middle ear diagnosis. Scanning angles were up to 8 degrees at resonance and the temperature dependence was within 1.2%. [ view full abstract ]
Authors
- Jaekwon Lee (Gwangju Institute of Science and Technology (GIST))
- Sang-Jin Lee (Gwangju Institute of Science and Technology (GIST))
- Seunghwan Moon (Gwangju Institute of Science and Technology)
- Yangkyu Park (Gwangju Institute of Science and Technology (GIST))
- Kwanghyun Kim (Gwangju Institute of Science and Technology)
- Jong-Hyun Lee (Gwangju Institute of Science and Technology (GIST))
Topic Areas
Novel actuators and optically-powered devices , Optical imaging, sensing and metrology
Session
PS-1 » Posters and Reception (17:00 - Tuesday, 15th August)
