Two-axis quasistatic gimbal-less microscanner with concentrically tilted stationary comb electrodes
Abstract
Two-axis quasistatic gimbal-less microscanners were fabricated through the microassembly of a glass lid and stationary comb electrodes. The total optical scan angles were enlarged to 5.2° and 5.8° for horizontal and vertical... [ view full abstract ]
Authors
- Seunghwan Moon (Gwangju Institute of Science and Technology (GIST))
- Jaekwon Lee (Gwangju Institute of Science and Technology (GIST))
- Yangkyu Park (Gwangju Institute of Science and Technology (GIST))
- Kwanghyun Kim (Gwangju Institute of Science and Technology (GIST))
- Sang-Jin Lee (Gwangju Institute of Science and Technology (GIST))
- Jong-Hyun Lee (Gwangju Institute of Science and Technology (GIST))
Topic Areas
Novel actuators and optically-powered devices , Biomedical optical devices and nano-biophotonics
Session
We-4 » Micromirror Scanners (16:00 - Wednesday, 16th August, Sierra/Cumbre/Vista)
