Analog Silicon Photonic MEMS Phase-Shifter with Double-Step Electrostatic Actuation
Abstract
We present the design of an analog Silicon Photonic MEMS phase shifter based on vertically moving adiabatic couplers. Using a two-step electrostatic actuation method, the phase shifter can be turned on selectively by applying... [ view full abstract ]
Authors
- Hamed Sattari (École Polytechnique Fédérale de Lausanne (EPFL))
- Teodoro Graziosi (École Polytechnique Fédérale de Lausanne (EPFL))
- Marcell Kiss (École Polytechnique Fédérale de Lausanne (EPFL))
- Tae Joon Seok (Gwangju Institute of Science and Technology)
- Sangyoon Han (Korea Advanced Institute of Science and Technology)
- Ming C. Wu (Department of Electrical Engineering and Computer Sciences, University of California, Berkeley)
- Niels Quack (École Polytechnique Fédérale de Lausanne (EPFL))
Topic Areas
Silicon photonics, waveguides, photonic crystals , Optomechanics and optofluidics
Session
Mo-1 » Silicon Photonics (09:15 - Monday, 14th August, Sierra/Cumbre/Vista)
