Uncooled Infrared Sensor Using Torsional Resonator and Electrostatic Detection
Abstract
A new torsional resonator is designed for the infrared sensor. The actuation uses the fringe field from the vertical sidewall. The electrostatic detection bases on the transmitted voltage to the electrode near to the resonator. [ view full abstract ]
Authors
- Minoru Sasaki (Toyota Technological Institute)
Topic Area
Optical and photonic sensors, transducers and microsystems
Session
We-2 » Optical sensing and imaging systems (11:30 - Wednesday, 16th August, Sierra/Cumbre/Vista)