Uncooled Infrared Sensor Using Torsional Resonator and Electrostatic Detection

A new torsional resonator is designed for the infrared sensor. The actuation uses the fringe field from the vertical sidewall. The electrostatic detection bases on the transmitted voltage to the electrode near to the resonator. [ view full abstract ]

A new torsional resonator is designed for the infrared sensor. The actuation uses the fringe field from the vertical sidewall. The electrostatic detection bases on the transmitted voltage to the electrode near to the resonator.