MEMS 3-Dimensional Scanner for Handheld Confocal Microscope
Abstract
A MEMS scanning mirror based on a deformable SU-8 membrane mirror supported by a biaxial gimbal with SU-8 flexures delivers 3-dimensional beam scanning for a handheld confocal microscope. Beam scanning and focusing performance... [ view full abstract ]
Authors
- Tianbo Liu (Montana State University)
- David Dickensheets (Montana State University)
Topic Area
Tunable and active micro- and nano-devices: optical, plasmonic, THz
Session
We-4 » Micromirror Scanners (16:00 - Wednesday, 16th August, Sierra/Cumbre/Vista)
