Integrated spectrometer and displacement sensor based on mechanically tunable photonic crystals
Abstract
We present a nano-opto-electro-mechanical sensor based on electrostatically tunable double-membrane photonic crystal cavities. We demonstrate free-space and waveguide coupling schemes for the input light, while the readout is... [ view full abstract ]
Authors
- Zarko Zobenica (Eindhoven University of Technology)
- Rob W. Van Der Heijden (Eindhoven University of Technology)
- Maurangelo Petruzzella (Eindhoven University of Technology)
- Francesco Pagliano (Eindhoven University of Technology)
- Tian Xia (Eindhoven University of Technology)
- Leonardo Midolo (Eindhoven University of Technology)
- Michele Cotrufo (Eindhoven University of Technology)
- Yongjin Cho (Eindhoven University of Technology)
- Frank W.m. Van Otten (Eindhoven University of Technology)
- Andrea Fiore (Eindhoven University of Technology)
Topic Areas
Optical imaging, sensing and metrology , Optical and photonic sensors, transducers and microsystems
Session
Th-1 » Cavity optomechanical devices (09:15 - Thursday, 17th August, Sierra/Cumbre/Vista)
