An Ultra-Fast Electrothermal Micromirror with Bimorph Actuators Made of Copper/Tungsten
Abstract
This paper reports an ultra-fast electrothermal bimorph micromirror with an inverse-series-connected bimorph actuator, which is made up of Cu-W bimorph. This mirror has a high rotational resonant frequency of 12.8 kHz. [ view full abstract ]
Authors
- Dingkang Wang (University of Florida)
- Xiaoyang Zhang (University of Florida)
- Liang Zhou (University of Florida)
- Mengyue Liang (University of Florida, Tianjin University)
- Daihua Zhang (Tianjin University)
- Huikai Xie (University of Florida)
Topic Areas
Novel actuators and optically-powered devices , Nanofabrication, packaging and integration
Session
PS-1 » Posters and Reception (17:00 - Tuesday, 15th August)
