Aperture Arrays for Subnanometer Calibration of Optical Microscopes
Abstract
We fabricate and test subresolution aperture arrays as calibration devices for optical localization microscopy. An array pitch with a relative uncertainty of approximately one part in ten thousand enables localization with... [ view full abstract ]
Authors
- Craig Copeland (NIST CNST)
- Craig Mcgray (NIST PML)
- Jon Geist (NIST PML)
- J. Alexander Liddle (NIST CNST)
- B. Robert Ilic (NIST CNST)
- Samuel Stavis (NIST CNST)
Topic Areas
Nanofabrication, packaging and integration , Optical imaging, sensing and metrology
Session
Mo-3 » Systems and applications (15:30 - Monday, 14th August, Sierra/Cumbre/Vista)
