Tunable Terahertz Bandpass Filter using MEMS Reconfigurable Metamaterial

We report on a tunable terahertz bandpass filter based on a cross-shaped slot resonator with a reconfigurable roll-up micro cantilevers. The built-in capacitors within the resonator are electrostatically actuated to shift the... [ view full abstract ]

We report on a tunable terahertz bandpass filter based on a cross-shaped slot resonator with a reconfigurable roll-up micro cantilevers. The built-in capacitors within the resonator are electrostatically actuated to shift the resonant frequency. For electrostatic actuation, the unit cells of the proposed filter are interconnected in the lateral direction to form a row of devices. By binary coding two sets of cantilevers, the structures of the proposed filter can choose one of four resonant states. Electromagnetic simulation is performed to show the feasibility of dynamic tuning of resonators by controlling the built-in capacitors.