Fabrication of Varifocal Scanner Integrated with Piezoresistive Focal length and Angle Sensors
Abstract
We present the varifocal scanner combined with the piezoresistors to monitor the rotation angle and focal length. The angle sensor measures with the accuracy of ±0.021 degree in the range of ±1.2 degree [ view full abstract ]
Authors
- Kenta Nakazawa (Tohoku University)
- Takashi Sasaki (Tohoku University)
- Hiromasa Furuta (Panasonic Industrial Devices SUNX Co., Ltd)
- Jiro Kamiya (Panasonic Industrial Devices SUNX Co., Ltd)
- Hideki Sasaki (Panasonic Industrial Devices SUNX Co., Ltd)
- Toshikazu Kamiya (Panasonic Industrial Devices SUNX Co., Ltd)
- Kazuhiro Hane (Tohoku University)
Topic Areas
Tunable and active micro- and nano-devices: optical, plasmonic, THz , Nanofabrication, packaging and integration
Session
We-4 » Micromirror Scanners (16:00 - Wednesday, 16th August, Sierra/Cumbre/Vista)
Paper
Fabrication_of_Varifocal_Scanner_Integrated_with_Focal_length_and_Angle_Sensors.pdf
