Characteristics of ultra-thin MEMS mirror device on flexibe substrate
Abstract
We have developed a flexible ultra-thin MEMS mirror device. Thethickness of the device is 5.31 µm. The MEMS mirror device could be actuated onthe bent and flexible substrate. [ view full abstract ]
Authors
- Toshihiro Takeshita (AIST)
- Takahiro Yamashita (AIST)
- Natsumi Makimoto (AIST)
- Takeshi Kobayashi (AIST)
Topic Areas
Nanofabrication, packaging and integration , Optical and photonic sensors, transducers and microsystems
Session
We-1 » Flexible structures and devices (09:15 - Wednesday, 16th August, Sierra/Cumbre/Vista)
