Feasibility Study of the OCT Probe using MEMS Optical Scanner Array for High Speed Inspection
Abstract
We developed a microscanner-based optical coherence tomography probe for the 3-dimensional inspection of display panels, which will be extended to arrayed scanners to enhance inspection speed. The scanning range and beam... [ view full abstract ]
Authors
- Kwanghyun Kim (Gwangju Institute of Science and Technology)
- Seunghwan Moon (Gwangju Institute of Science and Technology)
- Jaekwon Lee (Gwangju Institute of Science and Technology (GIST))
- Yangkyu Park (Gwangju Institute of Science and Technology (GIST))
- Sang-Jin Lee (Gwangju Institute of Science and Technology (GIST))
- Jong-Hyun Lee (Gwangju Institute of Science and Technology (GIST))
Topic Area
Optical imaging, sensing and metrology
Session
PS-1 » Posters and Reception (17:00 - Tuesday, 15th August)
