Sub-10-Nanometer-Scale Laser Ablation on Hard Materials From Dielectric Near-Field Nanophotonics
Abstract
This paper demonstrates a sub-10-nanometer (nm) laser ablation on SiO2. Silicon near-field nanophotonics focuses an 800-nm femtosecond laser into deep sub-wavelength scale. Consequently, 8-nm features with depth-to-width ratio... [ view full abstract ]
Authors
- Yong Ho Kwon (University of Wisconsin - Madison)
- Hewei Liu (University of Wisconsin - Madison)
- Soongyu Yi (University of Wisconsin - Madison)
- Hao Bian (Xi'an Jiaotong University)
- Feng Chen (Xi'an Jiaotong University)
- Zongfu Yu (University of Wisconsin - Madison)
- Hongrui Jiang (University of Wisconsin - Madison)
Topic Areas
Nanoscale light-matter interactions: electro-mechanical, phononic, photonic, plasmonic , Nanofabrication, packaging and integration
Session
PS-1 » Posters and Reception (17:00 - Tuesday, 15th August)
