Batch production of silicon fiber-top cantilever devices
Abstract
We present a fabrication procedure for batch production of MEMS devices directly on top of an optical fiber. Here, the stepwise fabrication procedure is described and the performance of the final device is demonstrated. [ view full abstract ]
Authors
- Jan Rector (VU University Amsterdam)
- Steven Beekmans (VU University Amsterdam)
- Martin Slaman (VU University Amsterdam)
- Remco Verdoold (Philips Electronics Nederland B.V.)
- Davide Iannuzzi (VU University Amsterdam)
Topic Areas
Biomedical optical devices and nano-biophotonics , Optical and photonic sensors, transducers and microsystems
Session
We-3 » Bio sensing and applications (14:30 - Wednesday, 16th August, Sierra/Cumbre/Vista)
