Investigation of Morphological and Optical Properties of Stain Etched Silicon

Abstract

In the present work, we present the fabrication of ordered porous pyramids and silicon macropores by stain etching which is a low coast and simple chemical method. The etching of silicon surfaces is made in a solution based on... [ view full abstract ]

Authors

  1. Maha Ayat (CMSI, Centre de Recherche en Technologie des Semi-conducteurs pour l’Energétique)
  2. Sabrina Sam (Centre de Recherche en Technologie des Semi-conducteurs pour l’Energétique, Division Couches Minces Surfaces et Interfaces)
  3. Noureddine Gabouze (CMSI, Centre de Recherche en Technologie des Semi-conducteurs pour l’Energétique)
  4. Rabah Boukherroub (Interdisciplinary Research Institute (IRI), IRI-IEMN, CNRS)

Topic Area

Optical properties of nanostructures

Session

PS3 » Poster Session (13:30 - Friday, 11th November, Gallery)

Presentation Files

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