Investigation of the phase formation from nickel-modified nanostructured silicon

Abstract

Introduction The nickel-modified nanostructured silicon allows to implement a number of different applications. It is known as promising material for use in devices of silicon microelectronics, for gas sensing and for active... [ view full abstract ]

Authors

  1. Olga Volovlikova (National Research University of Electronic Technology)
  2. Yulia Shilyaeva (National Research University of Electronic Technology)
  3. Alexandra Berezkina (National Research University of Electronic Technology)
  4. Sergey Gavrilov (National Research University of Electronic Technology)

Topic Area

Nanofabrication, nanoprocesing & nanomanufacturing

Session

PS3 » Poster Session (13:30 - Friday, 20th October, Hall & Room 3)

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