An electromagnetically actuated 3-axis gimbal-less micro-mirror for beam steering

A 3-axis scanning MEMS mirror has been developed that is driven by Lorentz force. The actuators embedded in all 4 sides of the gimbal-less mirror, enable individual control over the sides. The optical tilt angle of the mirror... [ view full abstract ]

A 3-axis scanning MEMS mirror has been developed that is driven by Lorentz force. The actuators embedded in all 4 sides of the gimbal-less mirror, enable individual control over the sides. The optical tilt angle of the mirror was measured to be 14.5º about Y-axis and 20º about X-axis by consuming 2.3 mW of rms power at resonance mode. A linear vertical motion of more than 200 µm was achieved with 75 mW of dc power. All actuators are individually controllable in both static and dynamic mode by applying dc or ac current.