Si-based waveguides for evanescent-field sensors

We present a detailed study of Si-based optical waveguides, which can be used as evanescent field sensors for the quantitative analysis of various gases and liquids. Direct quantitative comparison of simulation with... [ view full abstract ]

We present a detailed study of Si-based optical waveguides, which can be used as evanescent field sensors for the quantitative analysis of various gases and liquids. Direct quantitative comparison of simulation with experimental results of directional coupling structures allows fine-tuning of the opticalmaterial parameters and provides important input for future sensor design.