An algorithm For Boron diffusion in MOS transistor Using SILVACO ATHENA and Matlab


In this work, we have developed an algorithm-implemented with Matlab based on theoretical model of boron diffusion in a highly doped poly-Si film.      The numerical method used is the finite differences method. The... [ view full abstract ]


  1. Guenifi Naima (University Batna, department of electronics -)
  2. Mahamdi Ramdane (Department of Electronics, University of Batna, Algeria)
  3. Rahmani Ibrahim (Department of Electronics, University of Batna, Algeria)

Topic Area

B - Fabrication processes and applications in the industry


PS3 » Poster Session (13:30 - Wednesday, 5th July, Main hall)

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