Design and Simulation of SAW sensor for Photo Sensing

Surface acoustic wave (SAW) devices based on various types of acoustic waves such as Rayleigh wave, Shear-SAW, Love wave, acoustic plate mode (APM) and flexural plate wave (FPM) have been explored for sensors, actuators and... [ view full abstract ]

Surface acoustic wave (SAW) devices based on various types of acoustic waves such as Rayleigh wave, Shear-SAW, Love wave, acoustic plate mode (APM) and flexural plate wave (FPM) have been explored for sensors, actuators and telecommunication applications. 

 The velocities of waves depend on density and elasticity material properties and are very sensitive on change of surface layer mechanical parameters. This sensitivity is why SAW devices are as popular as sensor devices.

 The SAW can be generated in piezoelectric material using interdigital transducer (IDT). It is basically comb-like structure with fingers connected to electric terminals. The width and spacing of fingers affect the center frequency of IDT. The number of IDTs affects the length of impulse characteristics and filter band-width. The length of IDT fingers affects primarily the input admittance of IDT and defines the width of wave-beam, what is important when considering the diffraction effects.

 This paper reports on fast and high resolution photo detectors based on SAW sensor. In this device deals with Design and Simulation of SAW sensor using various methods such as equivalent circuit model, coupling of modes methods. 

 SAW sensor is made from optical grade application of LiNbO₃ substrate. And IDT make of aluminum material. We analyzed the sensitive device designed by simulating the electrical characteristics changes of the saw device according to the aperture and delay lines.