Super-resolution optical imaging of nanostructures using SMAL (Super-resolution Microsphere Amplifying Lens)

Optical imaging is one of the most difficult tasks in characterizing nanostructures due to the diffraction limit. Using our novel SMAL (Super-resolution Microsphere Amplifying Lens) lens, we could image nanostructures with... [ view full abstract ]

Optical imaging is one of the most difficult tasks in characterizing nanostructures due to the diffraction limit. Using our novel SMAL (Super-resolution Microsphere Amplifying Lens) lens, we could image nanostructures with dimensions between 70 nm - 100 nm in wide field reflection mode. SMAL is a long lifespan super-resolution objective lens whose front lens assembly contains an attached optically aligned high refractive index microsphere which is replaceable. The microsphere is optically aligned along the XYZ axes and attached using a single refractive index medium between itself and the front hemispherical lens of the objective. We are offering a complementary technique to SEMs (Scanning Electron Microscopes) by offering simultaneous 3D multi-layer imaging and color information. SMAL can be easily applied for fluorescent samples as a complementary technique for STED (Stimulated emission depletion) and STORM (Stochastic Optical Reconstruction Microscopy) but without the need of fluorescent staining. The work presents full color wide area images of silicon nanostructures which come from different layers of microprocessors, SoCs (System-on-Chips) as well as bio samples. The imaging scanning is a contactless non-invasive and non-destructive process and has lead to the development of a new microscope, NANOPSIS, with a custom software and optical optimization able to correct the distortions induced by the microsphere.