Fabrication and characterization of micromachined micro-axicons made by micro glass blowing process

Thespecific conical shape of the axicon makes them well suited for the generationof so-called Bessel beams. We present here a technological micro-glass blowing platform developedfor miniaturization of microoptical components.... [ view full abstract ]

Thespecific conical shape of the axicon makes them well suited for the generationof so-called Bessel beams. We present here a technological micro-glass blowing platform developedfor miniaturization of microoptical components. This employs the glass-blowingprocess, silicon micromachining and heterogeneous bonding. Here, we focus onthe unconventional fabrication method for micromachined micro-axicons inborosilicate glass. The generation of Bessel beams is demonstrated andexperimentally validated.