Selective Infiltration Damping of MEMS Scanning Mirrors

Quasi-static MEMS scanning mirrors are used for optical beam steering. They have to provide a broad mechanical bandwidth depending on the desired speed. In this work an approach by passive damping of the MEMS mirrors with gel... [ view full abstract ]

Quasi-static MEMS scanning mirrors are used for optical beam steering. They have to provide a broad mechanical bandwidth depending on the desired speed. In this work an approach by passive damping of the MEMS mirrors with gel droplets is described, that allows to increase the usable bandwidth. In order to achieve this, a dielectric gel is dispensed into the mirrors' structure. The appropriate infiltration method is presented. Static and dynamic properties such as maximum tilt angle and frequency response are investigated. Furthermore the reduction of parasitic effects like the coupling of the two axes of the mirror is discussed.