Selective Infiltration Damping of MEMS Scanning Mirrors


Quasi-static MEMS scanning mirrors are used for optical beam steering. They have to provide a broad mechanical bandwidth depending on the desired speed. In this work an approach by passive damping of the MEMS mirrors with gel... [ view full abstract ]


  1. Stefan Richter (Carl Zeiss AG)
  2. Georg Widholz (University of Applied Sciences Ernst Abbe Jena)
  3. Robert Brunner (University of Applied Sciences Ernst Abbe Jena)

Topic Areas

Optical Scanners and Micromirrors , Packaging and Integration


WE-3 » Bioimaging & Scanning (14:30 - Wednesday, 1st August, Forum Rolex)