Tunable double membrane MEMS Fabry-Pérot interferometers for the near-infrared


We present electrostatically actuated, surface-micromachined MEMS Fabry-Pérot interferometers with two released membrane mirrors. Actuation of the lower mirror towards the substrate allows resonance tuning over the full free... [ view full abstract ]


  1. Christian Huber (Robert Bosch GmbH)
  2. Christoph Krämmer (Robert Bosch GmbH)
  3. Benedikt Stein (Robert Bosch GmbH)
  4. Heinz Kalt (Karlsruhe Institute of Technology)

Topic Areas

Tunable Filters , Microspectrometers


WE-2 » Spectral Devices (11:00 - Wednesday, 1st August, Forum Rolex)