Effects of Triton X-n Surfactants on the Fabrication of Si (110) On-chip Micromirrors


Wet etched 45o micromirrors on silicon are useful for directing light from one optical component to another. This work attempts to study the effect of utilizing Triton X series surfactant, namely X-45, X-100 and X-405 for Si... [ view full abstract ]


  1. Simon Goh (Nanyang Technological University)
  2. Kailiang Chuan (Excelitas Technologies)
  3. Chuan Seng Tan (Nanyang Technological University)

Topic Areas

Optical Scanners and Micromirrors , MOEMS Fabrication Technologies


TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)