Novel 512 x 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology

Abstract

We have developed a novel 512 x 320 micro mirror array consisting of 2axis-tip-tilt actuators with 48µm pixel size, allowing a continuous, pure tip-tilt motion up to 3.5° in arbitrary directions, fully calibratable with... [ view full abstract ]

Authors

  1. Andreas Gehner (Fraunhofer Institute for Photonic Microsystems)

Topic Area

Spatial Light Modulators

Session

INV-9 » Invited: Dr. Andreas Gehner - Novel 512 x 320 Tip-Tilt Micro Mirror Array in a CMOS-Integrated, Scalable Process Technology (11:45 - Wednesday, 1st August, Forum Rolex)