Aluminum-Polymer Deformable Mirror using Electromagnetic Actuators for Spatial Light Modulation

This paper presents a low operational voltage and low current Lorentz force deformable mirror for adaptive optics. The system consists of a 12 × 12 mm2 Al/SU-8/Al mirror attached to a 5 × 5 actuator array. The actuators are... [ view full abstract ]

This paper presents a low operational voltage and low current Lorentz force deformable mirror for adaptive optics. The system consists of a 12 × 12 mm² Al/SU-8/Al mirror attached to a 5 × 5 actuator array. The actuators are formed from single crystal silicon by using bulk-micromachining. For the mirror, aluminum coated flexible SU-8 is used as the structural material. The prototype demonstrated mirror deformation of 40 µm at 9 mA current (< 1 V) within a 0.35 Tesla magnetic field. Operation frequency of around 2 kHz was shown possible, which can be suitable for large deformation adaptive optics applications.