An electromagnetically actuated 3-axis gimbal-less micro-mirror for beam steering


A 3-axis scanning MEMS mirror has been developed that is driven by Lorentz force. The actuators embedded in all 4 sides of the gimbal-less mirror, enable individual control over the sides. The optical tilt angle of the mirror... [ view full abstract ]


  1. Elnaz Afsharipour (University of Manitoba)
  2. Byoungyoul Park (University of Manitoba)
  3. Ramin Soltanzadeh (University of Manitoba)
  4. Cyrus Shafai (University of Manitoba)

Topic Areas

Optical Scanners and Micromirrors , Micro-Optical Systems for Imaging, Microscopy and Display


TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)