Enhancement of optical quality factor by thermal annealing of single crystal diamond micro-resonators

Abstract

We report on the increase in optical quality factor of a suspended single crystal diamond micro-disk resonator by thermal annealing. The resonators are fabricated by Deep Reactive Ion Etching (DRIE) to obtain circular pillars... [ view full abstract ]

Authors

  1. Teodoro Graziosi (EPFL)
  2. Sichen Mi (EPFL)
  3. Marcell Kiss (EPFL)
  4. Niels Quack (EPFL)

Topic Area

Diamond Photonics

Session

MO-3 » Nanophotonics & Optomechanics (14:30 - Monday, 30th July, Forum Rolex)