An ultra-sensitive glucose sensor by using metamaterial-based microfluidic chip

A large-scale lithography-free metamaterial (MM) is presented, which is integrated with a microfluidic chip for effective glucose sensing. MM is composed of hybrid nanopillars fabricated with SiO2 and Au thin-films on Si... [ view full abstract ]

A large-scale lithography-free metamaterial (MM) is presented, which is integrated with a microfluidic chip for effective glucose sensing. MM is composed of hybrid nanopillars fabricated with SiO₂ and Au thin-films on Si substrate. It exhibits angle-independence, and polarization-independence, which are the most important factors for color filters for industrial applications. The resonance shift is 56 nm with a stable bandwidth (~30 nm) by varying concentration of glucose solution. The sensitivity is 158 nm/RIU and the corresponding figure-of-merit is 5.3.