An optofluidic refractive phase modulator with an electrostatic 2D actuator array

We present a new optofluidic refractive phase modulator as an alternative to state-of-the-art deformable mirrors targeting adaptive optics microscopy. When employed together with a sensorless wavefront estimation technique,... [ view full abstract ]

We present a new optofluidic refractive phase modulator as an alternative to state-of-the-art deformable mirrors targeting adaptive optics microscopy. When employed together with a sensorless wavefront estimation technique, this device can simplify the architecture of the conventional adaptive optics systems by eliminating need for folded optical path. With an 37-electrode architecture, it can attain a best-flat of 9 nm under open-loop control and can correct up to the 4th order Zernike modes with high accuracy and fidelity.