Effect of Perforation Ratio on the Actuation Voltage Reduction of a Tri-Electrode Electrostatic Actuator

Research on the perforation ratio of an electrostatic actuator with tri-electrode topology is presented to understand the effect on voltage reduction. A tri-electrode configuration is formed by placing a perforated... [ view full abstract ]

Research on the perforation ratio of an electrostatic actuator with tri-electrode topology is presented to understand the effect on voltage reduction. A tri-electrode configuration is formed by placing a perforated intermediate electrode between the MEMS device and drive electrode of a conventional electrostatic actuator. Presented simulation and experimental results show the tri-electrode configuration greatly reducing the voltage needed to control the displaced position of the MEMS device, while still providing the full actuation stroke. Reduction of needed control voltage by up to 6 times is demonstrated.