Effect of Perforation Ratio on the Actuation Voltage Reduction of a Tri-Electrode Electrostatic Actuator


Research on the perforation ratio of an electrostatic actuator with tri-electrode topology is presented to understand the effect on voltage reduction. A tri-electrode configuration is formed by placing a perforated... [ view full abstract ]


  1. Yu Zhou (University of Manitoba)
  2. Cyrus Shafai (University of Manitoba)
  3. Lot Shafai (University of Manitoba)

Topic Area

Microactuators for Optical Devices


WE-3 » Bioimaging & Scanning (14:30 - Wednesday, 1st August, Forum Rolex)