Variable Structured Illumination with Lissajous Scanned MEMS Mirror


We report the realization of variable structured illumination using a controlled Lissajous scanning MEMS mirror. The MEMS mirror was electrostatically operated at pseudo-resonant frequencies within the bandwidth. The pattern... [ view full abstract ]


  1. Yeong-Hyeon Seo (KAIST)
  2. Sung-Pyo Yang (KAIST)
  3. Won-kyung Lee (KAIST)
  4. Kyungmin Hwang (KAIST)
  5. Ki-Hun Jeong (KAIST)

Topic Areas

Optical Scanners and Micromirrors , Micro-Optical Systems for Imaging, Microscopy and Display


TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)