Characterization of a fast piezoelectric varifocal MEMS mirror
Abstract
We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a... [ view full abstract ]
Authors
- Paul Janin (University of Strathclyde)
- Ralf Bauer (University of Strathclyde)
- Paul Griffin (University of Strathclyde)
- Erling Riis (University of Strathclyde)
- Deepak Uttamchandani (University of Strathclyde)
Topic Areas
Optical Scanners and Micromirrors , Microphotonics
Session
TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)
