Characterization of a fast piezoelectric varifocal MEMS mirror


We present the characterization of a novel design for a varifocal MEMS mirror with piezoelectric actuation and defocus movement up to 100 kHz. The device was simulated using a finite-element method, fabricated using a... [ view full abstract ]


  1. Paul Janin (University of Strathclyde)
  2. Ralf Bauer (University of Strathclyde)
  3. Paul Griffin (University of Strathclyde)
  4. Erling Riis (University of Strathclyde)
  5. Deepak Uttamchandani (University of Strathclyde)

Topic Areas

Optical Scanners and Micromirrors , Microphotonics


TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)