Integrated optomechanical displacement sensor based on a photonic crystal cavity
Abstract
Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in... [ view full abstract ]
Authors
- Federico Galeotti (Eindhoven University of Technology)
- Ivana Sersic-Vollenbroek (Eindhoven University of Technology)
- Maurangelo Petruzzella (Eindhoven University of Technology)
- Francesco Pagliano (Eindhoven University of Technology)
- Zarko Zobenica (Eindhoven University of Technology)
- Frank Van Otten (Eindhoven University of Technology)
- Hamed Sadeghian Marnani (Netherlands Organisation for Applied Scientific Research TNO)
- Rob Van Der Heijden (Eindhoven University of Technology)
- Andrea Fiore (Eindhoven University of Technology)
Topic Area
Optical MEMS Sensors
Session
MO-3 » Nanophotonics & Optomechanics (14:30 - Monday, 30th July, Forum Rolex)
