Linearization of an electrostatic microscanner with concentrically tilted stationary comb electrodes
Abstract
We present linearized characteristics of an electrostatic microscanner having concentrically tilted stationary comb electrodes. The capacitance change rate was designed to be constant so that the electrostatic torque was only... [ view full abstract ]
Authors
- Seunghwan Moon (Gwangju Institute of Science and Technology (GIST))
- Kwanghyun Kim (Gwangju Institute of Science and Technology (GIST))
- Jaekwon Lee (Gwangju Institute of Science and Technology (GIST))
- Yangkyu Park (Gwangju Institute of Science and Technology (GIST))
- Sang-Jin Lee (Gwangju Institute of Science and Technology (GIST))
- Sihyung Son (Gwangju Institute of Science and Technology (GIST))
- Jong-Hyun Lee (Gwangju Institute of Science and Technology (GIST))
Topic Areas
Optical Scanners and Micromirrors , Microactuators for Optical Devices
Session
TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)
