Vibrating Dichroic MEMS Scanner Towards Ultrasmall Laser Scanning Microscopes
Abstract
In this article authors present a conceptual design for ultrasmall laser scanning microscopes utilizing a vibrating dichroic MEMS scanner. In our design the reflective coating layer on the mirror plate of a MEMS scanner is... [ view full abstract ]
Authors
- Yingshun Xu (School of Biomedical Engineering and Technology, Tianjin Medical University)
- Jin Cheng (School of Optoelectronic Engineering, Xi'an Technological University)
- Naitao Xu (MEMS Research and Development Center, China Key System Integrated Circuit Co., Ltd.)
Topic Areas
Optical Scanners and Micromirrors , Micro-Optical Systems for Imaging, Microscopy and Display
Session
TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)
