Vibrating Dichroic MEMS Scanner Towards Ultrasmall Laser Scanning Microscopes


In this article authors present a conceptual design for ultrasmall laser scanning microscopes utilizing a vibrating dichroic MEMS scanner. In our design the reflective coating layer on the mirror plate of a MEMS scanner is... [ view full abstract ]


  1. Yingshun Xu (School of Biomedical Engineering and Technology, Tianjin Medical University)
  2. Jin Cheng (School of Optoelectronic Engineering, Xi'an Technological University)
  3. Naitao Xu (MEMS Research and Development Center, China Key System Integrated Circuit Co., Ltd.)

Topic Areas

Optical Scanners and Micromirrors , Micro-Optical Systems for Imaging, Microscopy and Display


TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)