A Miniature Lens Scanner With An Electrothermally-actuated Micro-stage


This paper reports the design and characterization of a MEMS lens scanner based on a novel electrothermally-actuated MEMS stage and a planoconvex polymer lens. Cu/W are used in the electrothermal bimorphs, replacing previously... [ view full abstract ]


  1. Liang Zhou (University of Florida)
  2. Xiaoyang Zhang (University of Florida)
  3. Yulung Sung (University of Houston)
  4. Wei-Chuan Shih (University of Houston)
  5. Huikai Xie (University of Florida)

Topic Areas

Optical Scanners and Micromirrors , Microactuators for Optical Devices


WE-3 » Bioimaging & Scanning (14:30 - Wednesday, 1st August, Forum Rolex)