Stress Engineered Coupling of IR Inactive Mode in CMOS Metamaterial Structures


We report high temperature (up to 400 deg.) coupling of infrared (IR) inactive >C=C< mode in CMOS compatible refractory metamaterial filter and absorber structure by leveraging the carbon defects in TEOS (Tetraethyl... [ view full abstract ]


  1. Dihan Hasan (National University of Singapore)
  2. Bin Yang (Shanghai Jiao Tong University)
  3. Chengkuo Lee (National University of Singapore)

Topic Area

Metamaterials and Metasurfaces


MO-2 » Metamaterials (11:00 - Monday, 30th July, Forum Rolex)