Evaluation of scanning micromirror with acoustic cavity

Abstract

The effect of the acoustic cavity for scanning micromirror have been evaluated. The dimension of mirror is 2.8 mm square and the resonant frequency is about 19.5 kHz. The rotational amplitude of the mirror was periodically... [ view full abstract ]

Authors

  1. Takashi Sasaki (Department of Finemechanics, Tohoku University)
  2. Takuya Kanesawa (Department of Finemechanics, Tohoku University)
  3. Kazuhiro Hane (Department of Finemechanics, Tohoku University)

Topic Area

Optical Scanners and Micromirrors

Session

TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)