Photoacoustic characterization of custom-made thin film AlN MEMS ultrasound transducers
Abstract
Two MEMS thin film aluminium nitride ultrasound transducer array designs for photoacoustic sensing applications are presented. They are characterized using the pitch and catch technique and photoacoustic excitation. The... [ view full abstract ]
Authors
- Jonas Kusch (University of Strathclyde)
- Gordon Flockhart (University of Strathclyde)
- Ralf Bauer (Stra)
- Deepak Uttamchandani (Strath)
Topic Area
Bio-Medical, Bio-Chemical, and other Optical Sensing Devices
Session
TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)
