Design and Fabrication of a Hydraulic Deformable Membrane Mirror for High-Power Laser Focusing

Deformable membrane mirrors allow designing compact optical systems with variable focal length. This is useful for many applications, including endoscopic laser surgery, in which a high-power laser beam is used to perform... [ view full abstract ]

Deformable membrane mirrors allow designing compact optical systems with variable focal length. This is useful for many applications, including endoscopic laser surgery, in which a high-power laser beam is used to perform precise incisions. However, most membrane mirrors proposed so far are not suitable for high-power laser, for being too small or having limited deflection. Hydraulic actuation allows achieving large deflection, regardless of the mirror size. In this work, we present a new deformable membrane mirror designed for hydraulic actuation and high-power laser compatibility.