Characterization of crystallographically etched single crystal diamond diffraction gratings


We report on the fabrication and experimental characterization of single crystal diamond diffraction gratings fabricated with crystallographic dry etching. High aspect ratio atomic force microscopy reveals a characteristic... [ view full abstract ]


  1. Marcell Kiss (EPFL)
  2. Teodoro Graziosi (EPFL)
  3. Adrien Toros (EPFL)
  4. Toralf Scharf (EPFL)
  5. Olivier Martin (EPFL)
  6. Niels Quack (EPFL)

Topic Areas

Microphotonics , MOEMS Fabrication Technologies


TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)