Stepped-Tuning Optical Diaphragm Fabricated With a Lithography-Less Process
Abstract
In this paper, we demonstrate a lithography-less process to fabricate a solid stepped-tuning diaphragm with a decent driving voltage. The device is designed to switch between two aperture sizes, 6 mm and 10 mm. [ view full abstract ]
Authors
- Jheng-Hong Gu (National Taiwan University/Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering)
- Wei-Chieh Lee (National Taiwan University/Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering)
- Yu-Fun Chen (National Taiwan University/Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering)
- Shun-Hao Yu (National Taiwan University/Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering)
- Jui-Che (Ted) Tsai (National Taiwan University/Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering)
Topic Areas
Tunable Micro- and Nano-Devices , Optical Micro- and Nano-Devices (Tunable and Fixed)
Session
TU-POS » Poster Session: Optical MEMS (Including Standing Dinner & Drinks) (18:05 - Tuesday, 31st July, Forum Rolex)
