Chemical State Analysis of Heavily Phosphorus-doped Epitaxial Silicon Films Grown on a Si (100) Substrate with XPS

Abstract

 Phosphorus-doped silicon (Si:P) has been actively researched because of its novel opto-electronic and mechanical properties which make it for potential applications in photo-voltaics and strain engineering. It is therefore... [ view full abstract ]

Authors

  1. Sung tae Kim (Yonsei university)
  2. Min Hyeong Lee (Yonsei university)
  3. Dae Hong Ko (Yonsei university)

Topic Areas

P - Materials science: polymers, thin films, nanopowders, ceramics, crystals, composites e , Si - Materials science: polymers, thin films, nanopowders, ceramics, crystals, composites

Session

OS2a-217b » Materials science: polymers, thin films, nanopowders, ceramics, crystals, composites etc. (13:30 - Tuesday, 4th July, 217b)

Presentation Files

2017_PBSi_KST.pptx