An algorithm For Boron diffusion in MOS transistor Using SILVACO ATHENA and Matlab

Abstract

In this work, we have developed an algorithm-implemented with Matlab based on theoretical model of boron diffusion in a highly doped poly-Si film.      The numerical method used is the finite differences method. The... [ view full abstract ]

Authors

  1. Guenifi Naima (University Batna, department of electronics,)
  2. Mahamdi Ramdane (Department of Electronics, University of Batna, Algeria)
  3. Rahmani Ibrahim (Department of Electronics, University of Batna, Algeria)

Topic Area

B - Fabrication processes and applications in the industry

Session

PS3 » Poster Session (13:30 - Wednesday, 5th July, Main hall)

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